NSR2205i12D Refurbished Steppers Specifications

The i-line Steppers uses a 365nm wavelength light source;

With Dual-Stage, Supports efficient and high-precision mass production of 6"/8" wafers;

Widely used in mature semiconductor process nodes (0.35μm and above), power devices, MEMS and advanced packaging.

● Wavelength:              365nm ;

● Numerical Aperture:      0.63 ;

● Resolution:                350nm ;

● Reduction ratio:               5:1 ;

● Exposure field:          22mm×22mm ;

● Overlay LSA/FIA:          60nm/70nm ;